By Joseph C. Doll, Beth L. Pruitt
Piezoresistor layout and purposes presents an summary of those MEMS units and comparable physics. The textual content demonstrates how MEMS permits miniaturization and integration of sensing in addition to effective packaging and sign conditioning. this article for engineers operating in MEMS layout describes the piezoresistive phenomenon and optimization in numerous purposes. comprises distinctive dialogue of such issues as; coupled types of mechanics, fabrics and digital habit in quite a few universal geometric implementations together with pressure gages, beam bending, and membrane loading. The textual content concludes with an up to date dialogue of the necessity for built-in MEMS layout and possibilities to leverage new fabrics, approaches and MEMS expertise.
Piezoresistor layout and purposes is a perfect e-book for layout engineers, strategy engineers and researchers.
Read Online or Download Piezoresistor Design and Applications PDF
Similar design books
Piezoresistor layout and purposes presents an summary of those MEMS units and similar physics. The textual content demonstrates how MEMS permits miniaturization and integration of sensing in addition to effective packaging and sign conditioning. this article for engineers operating in MEMS layout describes the piezoresistive phenomenon and optimization in numerous functions.
Computer-Aided Design of User Interfaces IV: Proceedings of the Fifth International Conference on Computer-Aided Design of User Interfaces CADUI’2004 Sponsored by ACM and jointly organised with the Eight ACM International Conference on Intelligent User In
Computer-Aided layout of consumer Interfaces IV gathers the newest examine of specialists, learn groups and top firms keen on computer-aided layout of person interactive functions supported via software program, with particular recognition for platform-independent person interfaces and context-sensitive or conscious functions.
- Design Fires in Road Tunnels - A Synthesis of Highway Practice
- Animal Psychophysics: the design and conduct of sensory experiments
- Quick-Turnaround ASIC Design in VHDL: Core-Based Behavioral Synthesis
- Pure design : 79 simple solutions for magazines, books, newspapers, and websites
- Design and Analysis of Integrator-Based Log-Domain Filter Circuits
Extra info for Piezoresistor Design and Applications
Ij = σji . Thus the stress tensor contains only six independent components. Strain, εij , is also directional. For an isotropic, homogeneous material, stress is related to strain by Hooke’s Law, σ = εE . Although effective values of Young’s modulus and Poisson’s ratio for a single direction are often employed for simple loading situations, a tensor is required to fully describe the mechanics of an anisotropic material such as silicon [6, 63, 196]. The stress and strain are related by the elastic stiffness matrix, C, where σij = Cijkl εkl , or equivalently by the compliance matrix, S, where εij = Sijkl σkl .
16 a CMOS integrated piezoresistive cantilever array (two scanning cantilevers and one reference cantilever). b Micrograph of the overall sensor CMOS signal conditioning circuit. c Array of 12 cantilevers (the inner ten can be used for scanning while the outer two serve as a reference). The dimensions of the scanning cantilevers are 500 × 85 µm (Source Reprinted with permission from . ©2004 National Academy of Sciences, USA) toward CMOS evolved with the availability of non-volatile memory (NVM).
A longitudinal tensile stress decreases the resistivity of n-type resistors and increases the resistivity of p-type resistors, while a transverse stress leads to the opposite effects. 17) where li , m i , and n i are the direction cosines between the crystallographic coordinate system and the direction of current flow and stress. The general form for computing the direction cosines is described in Ref. . 18) where φ is the angle between the direction of current flow in the piezoresistor and the <100> direction.